| 000 | 00612nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 220620s9999||||xx |||||||||||||| ||und|| | ||
| 100 | _aTunaboylu, Bahadir||Soydan, Ali M. | ||
| 245 | 0 | _aChapter MEMS Technologies Enabling the Future Wafer Test Systems | |
| 546 | _aEnglish[eng] | ||
| 650 | _awafer and package test systems, MEMS technology, interconnects, interposer, wafer probes | ||
| 856 | _uhttps://library.oapen.org/bitstream/20.500.12657/49284/1/58798.pdf||https://library.oapen.org/bitstream/20.500.12657/49284/1/58798.pdf||https://library.oapen.org/bitstream/20.500.12657/49284/1/58798.pdf | ||
| 942 | _cEB | ||
| 999 |
_c25209 _d25209 |
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