000			01818nam a2200121Ia 4500
008			220615s9999||||xx |||||||||||||| ||und||
100			_aBaldas, Lucien||Colin, Stéphane
245		0	_aGas Flows in Microsystems
546			_aEnglish[eng]
650			_apreconcentrator||UV absorption||n/a||bearing characteristics||ultraviolet light-emitting diode (UV LED)||resonant micro-electromechanical-systems (MEMS)||heat sinks||measurement and control||flow choking||mixing length||gas flows in micro scale||BTEX||kinetic theory||PID detector||ethylbenzene and xylene (BTEX)||computational fluid dynamics (CFD)||OpenFOAM||direct simulation Monte Carlo (DSMC)||thermally induced flow||vacuum micropump||miniaturization||gaseous rarefaction effects||modelling||volatile organic compound (VOC) detection||supersonic microjets||slip flow||Nano-Electro-Mechanical Systems (NEMS)||micro-mirrors||micro-scale flows||microfabrication||Knudsen pump||microfluidic||microfluidics||hollow core waveguides||capillary tubes||gas mixing||advanced measurement technologies||DSMC||Micro-Electro-Mechanical Systems (MEMS)||microchannels||miniaturized gas chromatograph||Pitot tube||multi-stage micromixer||analytical solution||pressure drop||micro-mixer||thermal transpiration||photoionization detector||FE analysis||gas mixtures||spectrophotometry||Knudsen layer||pulsed flow||Fanno flow||integrated micro sensors||binary gas mixing||modified Reynolds equation||rarefied gas flow||rarefied gas flows||backward facing step||modular micromixer||fractal surface topography||underexpansion||electronic cooling||splitter||compressibility||photolithography||Benzene||out-of-plane comb actuation||gas sensors||aerodynamic effect||fluid damping||toluene||control mixture composition
856			_uhttps://mdpi.com/books/pdfview/book/1748
942			_cEB
999			_c16926 _d16926