TY  - BOOK
AU  - Senturia, Stephen D
TI  - Microsystem design
SN  - 9781475774580
U1  - 621.381 SEN/M 
PY  - 2001///
CY  - Boston
PB  - Kluwer Academic Publishers, 
KW  - MICROELECTROMECHANICAL SYSTEMS- DESIGN AND CONSTRUCTION
KW  - SYSTEM DESIGN
KW  - MICROELECTRONICS
ER  -