TY - BOOK AU - Roy, Sunipa ; AU - Sarkar, Chandan Kumar TI - MEMS and nanotechnology for gas sensors SN - 9781498700122 U1 - 620.3 ROY/M PY - 2016/// CY - Boca Raton PB - CRC Press KW - Microelectromechanical systems, Gas detectors ER -