The Society of Chemical Engineers of Japan (Ed.) <br/><br/>
Introduction to VLSI process engineering 

 - Dordrecht,  Springer Science,  2020 
 - xiii, 210p. 
<br/><br/><label>ISBN: </label>9789402419672 
<br/><br/><label>Subjects--Topical Terms: </label><br/>VLSI
<br/><br/><label>Dewey Class. No.: </label>621.395 SOC/I