Leondes, Cornelius T. <br/><br/>
MEMS/NEMS :  handbook techniques and applications / Sensors & actuators Vol. 4 
 MEMS/NEMS handbook 

 - New York :  Springer,  c2006. 
 - xviii, 386.  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0387245200 9780387245201 
<br/><br/><label>Nat. Bib. No.: </label>GBA574276  bnb 
<br/><br/><label>Nat. Bib. Agency Control No.: </label>013283954  Uk 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction.<br/>Nanotechnology.
<br/><br/><label>Dewey Class. No.: </label>620.3 LEO/M