TY  - BOOK
AU  - Leondes, Cornelius T.
TI  - MEMS/NEMS: handbook techniques and applications / Fabrication techniques Vol.2
SN  - 0387245200
U1  - 620.3 LEO/M 
PY  - 2006///
CY  - New York
PB  - Springer
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Nanotechnology
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0663/2005042621-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy0814/2005042621-t.html
ER  -